The Varian IDP-3 dry scroll vacuum pumps is a compact, high performance dry pump that provides affordable oil-free vacuum and easy system integration, and is suitable for a wide variety of applications. The Varian IDP-3 employs an innovative hermetic design in which the motor and bearings are outside the vacuum space, allowing full isolation of all pumped gases. Delivering a robust pumping speed of 60 l/m (2.1 CFM) and a very low base pressure of less than 2.5×10-1 Torr. The Varian IDP-3 provides all the advantages of Varian’s patented scroll pump technology in a compact, lightweight, cost-effective package. These new Varian IDP-3 dry oil-free scroll vacuum pumps (Product Number IDP3D01) operate on 1 Ph, 24 VDC.
APPLICATIONS INCLUDE: Analytical Instrumentation • GC/MS • Residual gas analyzers • Load locks for mass spectrometers • Electron microscopes • Surface area analyzers • EM Sample prep coaters
Semiconductor Fabrication • Gas panels • Gas delivery systems • Double wall containment vessels
High Energy Physics • Accelerators • Beam lines • Synchrotrons
