The Varian IDP-3 dry scroll vacuum pumps is a compact, high performance dry pump that provides affordable oil-free vacuum and easy system integration, and is suitable for a wide variety of applications. The Varian IDP-3 employs an innovative hermetic design in which the motor and bearings are outside the vacuum space, allowing full isolation of all pumped gases. Delivering a robust pumping speed of 60 l/m (2.1 CFM) and a very low base pressure of less than 2.5×10-1 Torr. The Varian IDP-3 provides all the advantages of Varian’s patented scroll pump technology in a compact, lightweight, cost-effective package. These new Varian IDP-3 dry oil-free scroll vacuum pumps (Product Number IDP3D01) operate on 1 Ph, 24 VDC.
APPLICATIONS INCLUDE:
Analytical Instrumentation
• GC/MS
• Residual gas analyzers
• Load locks for mass spectrometers
• Electron microscopes
• Surface area analyzers
• EM Sample prep coaters
Semiconductor Fabrication
• Gas panels
• Gas delivery systems
• Double wall containment vessels
High Energy Physics
• Accelerators
• Beam lines
• Synchrotrons
Industrial processing
• Laser evacuation
• Cryogenic dewars
• Glove boxes
• Gas recovery and recirculation
• Cryopump roughing
• Tube processing
• Vacuum chucks.
General Research & Development
• Experimental chambers
• Sample prep systems
• Surface analysis systems
• Backing turbo pump on beam lines.




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