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NEW Agilent Varian IDP-3 Dry Oil-Free Scroll Vacuum Pump With Inlet Valve Kit PN IDP3A21, 220 VAC

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$3,630.54 $3,946.24

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The Varian IDP-3 dry scroll vacuum pumps is a compact, high performance dry pump that provides affordable oil-free vacuum and easy system integration, and is suitable for a wide variety of applications. The Varian IDP-3 employs an innovative hermetic design in which the motor and bearings are outside the vacuum space, allowing full isolation of all pumped gases. Delivering a robust pumping speed of 60 l/m (2.1 CFM) and a very low base pressure of less than 2.5×10-1 Torr. The Varian IDP-3 provides all the advantages of Varian’s patented scroll pump technology in a compact, lightweight, cost-effective package. These new Varian IDP-3 dry oil-free scroll vacuum pumps (Product Number IDP3D01) operate on 1 Ph, 24 VDC.

APPLICATIONS INCLUDE:
Analytical Instrumentation
• GC/MS
• Residual gas analyzers
• Load locks for mass spectrometers
• Electron microscopes
• Surface area analyzers
• EM Sample prep coaters

Semiconductor Fabrication
• Gas panels
• Gas delivery systems
• Double wall containment vessels

High Energy Physics
• Accelerators
• Beam lines
• Synchrotrons

Industrial processing
• Laser evacuation
• Cryogenic dewars
• Glove boxes
• Gas recovery and recirculation
• Cryopump roughing
• Tube processing
• Vacuum chucks.

General Research & Development
• Experimental chambers
• Sample prep systems
• Surface analysis systems
• Backing turbo pump on beam lines.

Category:
IDP-2 IDP-3
Peak pumping speed 60Hz 35 l/m, 2.1 m3/hr, 1.2 cfm 60 l/m, 3.6 m3/hr, 2.1 cfm
50Hz 30 l/m, 1.8 m3/hr, 1.1 cfm 50 l/m, 3.0 m3/hr, 1.8 cfm
Ultimate pressure 7.5 x 10-1 torr (1.0 mbar, 100 Pa) 2.5 x 10-1 torr (3.3 x 10-1 mbar, 33 Pa)
Maximum inlet pressure 1 atmosphere (1.0 bar, 101 kPa)
Maximum outlet pressure 1.4 atmospheres (1.4 bar, 142 kPa)
Inlet connection NW16 KF flange
Exhaust connection Female 1⁄4” NPT (10 mm hose barb provided)
Gas ballast connection Female 1⁄8” NPT
Ambient operating temperature 5 to 40°C (41 to 108°F)
Storage temperature –20 to 60 °C (–4 to 140°F)
Motor rating 0.16 horsepower (0.12 kW)
Supply power 1Ø – 100 VAC, 50-60 Hz : 1 5 VAC, 60 Hz : 220-240 VAC, 50-60 Hz
Motor thermal protection Automatic
Rotation speed 60Hz 3200 RPM
50Hz 2600 RPM
Cooling Air-cooled
Weight 9.5 kg (21 lbs)
Shipping weight 10.5 kg (23 lbs)
Restrictions No corrosive, explosive, or particulate-forming gases
Leak rate <1 x 10-6 std-cc/sec helium
Noise level (per ISO 11201) 55 dB(A)
Vibration level at inlet (per ISO 10816-1) 1.5 mm/second
Compliance Conforms with CE, CSA, CSA/CUS, Semi S2-703, and RoHS

 

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