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All in One
– Eliminates connection cable between pump and control unit
– No rack mount controller, controller built in
– super small foot print
High Performance
– Highest pumping speed in turbo-molecular class
– 40% lmproved throughput
– 32% Reduced power consumption in high gas flow

All in One
– Eliminates connection cable between pump and control unit
– No rack mount controller, controller built in
– super small foot print
High Performance
– Highest pumping speed in turbo-molecular class
– 40% lmproved throughput
– 32% Reduced power consumption in high gas flow

• Advanced rotor technology
  -Maximized process flexibility
  -Oil free
  -Low vibration
  -High reliability
  -Maintenance free
• Advanced controller design
  -Auto tuning
  -Self diagnostic functions
  -DC motor drive
  -Battery-free operation
• Compact design
  -Small footprint
  -Half rack controller

●Self Sensing Magnetic Bearing System
●Fully lntegrated Controller
●Automatic Balancing System
●Automatic Vibration Reduction

●Self Sensing Magnetic Bearing System
●Fully lntegrated Controller
●Automatic Balancing System
●Automatic Vibration Reduction

●Self Sensing Magnetic Bearing System
●Fully lntegrated Controller
●Automatic Balancing System
●Automatic Vibration Reduction