The Varian IDP-3 dry scroll vacuum pumps is a compact, high performance dry pump that provides affordable oil-free vacuum and easy system integration, and is suitable for a wide variety of applications. The Varian IDP-3 employs an innovative hermetic design in which the motor and bearings are outside the vacuum space, allowing full isolation of all pumped gases. Delivering a robust pumping speed of 60 l/m (2.1 CFM) and a very low base pressure of less than 2.5×10-1 Torr. The Varian IDP-3 provides all the advantages of Varian’s patented scroll pump technology in a compact, lightweight, cost-effective package. This pump is factory installed with an Inlet Valve Kit, for applications where the process is sensitive to pump debris that can be carried back into the pump at turn off. These new Varian IDP-3 dry oil-free scroll vacuum pumps (Product Number IDP3B21) operate on 1 Ph, 115 VAC, 50/60 Hz. An Instruction Manual and Brochure PDF on the IDP3 Scroll Pumps can be downloaded, by scrolling down to (AVAILABLE DOWNLOADS)
APPLICATIONS INCLUDE: Analytical Instrumentation • GC/MS • Residual gas analyzers • Load locks for mass spectrometers • Electron microscopes • Surface area analyzers • EM Sample prep coaters
Semiconductor Fabrication • Gas panels • Gas delivery systems • Double wall containment vessels
High Energy Physics • Accelerators • Beam lines • Synchrotrons
